The 13^th International Symposium on Non-thermal/Thermal Plasma
for Pollution Control & Sustainable Energy

Dr. Igor KAGANOVICH

Princeton Plasma Physics Laboratory, USA

Dr. Kaganovich is a Principal Research Physicist at Princeton Plasma Physics Laboratory and Deputy Head of the Theory Department of the Princeton Plasma Physics Laboratory. He received his Ph.D. at the Ioffe Physical-Technical Institute, Russia (1992), in plasma physics. He has worked in leading plasma-physics, applied-physics and chemical-engineering research centers in U.S.A., Russia, Germany, and Belgium. He serves as Associate Editor of Physics of Plasmas, and Co-Director of the Princeton Laboratory for Plasma Nanosynthesis.

His research interests include: beam-plasma interactions, high energy density plasmas, plasma synthesis of nanomaterials, atomic physics, and physics of partially-ionized plasmas. He and his students and postdoctoral colleagues have authored about 120 papers in many areas of plasma physics focusing on kinetic and collective effects in plasmas and particle beams with applications to laboratory and space plasmas, nuclear fusion, electric propulsion, gas discharges, and plasma processing.

He was elected a Fellow of the American Physical Society in 2007 and received Alexander von Humboldt Fellowship in 1996

He is a Senior Associate Editor of Physics of Plasmas and a Distinguished Research Fellow of PPPL.

Dr. Youngjin KIM

SK Hynix Inc, Korea

Yongjin Kim has worked for SK hynix as Research Fellow in the field of Plasma Monitoring for various Plasma Processes and Equipments as well as in Development of Dry Etch Processes and Equipments including Cryogenic Etch, Square Shape Bias and etc. after joining in March 2013. He has about 30 years of experience in the semiconductor industry. Prior to this role, he worked at Lam Research Co., Ltd. as Korea Regional Etch Product Director from 2011 to 2013; Principal Engineer in Dry Etch Process Development at Samsung Electronics Semiconductor R&D Center where he had started his career as a process engineer and developed Dry Etch Processes and Equipments for DRAM, NAND and Logic devices from 1995 to 2011. He holds a Ph.D. and a M.S. in Plasma Physics, and a B.S. in Physics from Korea Advanced Institute of Science and Technology.

Prof. Geun Young YEOM

Sungkyunkwan University, Korea

Educational History

Employment History

Selected Awards, Honors, & University Positions

Taesung Kim

Sungkyunkwan University, Korea

Dr. Taesung Kim received his Bachelor’s in Mechanical Engineering from Seoul National University, Korea in 1994. He received his Master’s, and Ph. D. in Mechanical Engineering from University of Minnesota, USA in 1998 and 2002, respectively. He joined Seagate Technology in 2002 and worked as Sr./Staff Engineer in Recording Head R&D.

Since 2005 Dr. Kim has been a professor in the School of Mechanical Engineering and SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University in Suwon, Korea. In 2014, he was appointed as SKKU Young Fellow and started working for SKKU Research & Business Foundation as a Vice President. During 2019 and 2020, he worked as a Vice President of Admission and he is currently a dean of College of Engineering starting 2023. His research interests include 2-D material synthesis using plasma process, optical fiber sensors, semiconductor fabrication process (CMP, cleaning and contamination control), and atmospheric/indoor aerosol control.

Ph.D. Seokmin YUN

Samsung Electronics Co., Ltd., Korea

Seokmin Yun is an executive vice president and the head of the Semiconductor Equipment R&D Innovation team at Samsung Electronics. Prior to joining Samsung Electronics, he worked at Lam Research where he headed various semiconductor equipment development projects. He also worked as a post doctoral researcher at University of California, San Diego. Seokmin Yun earned Ph.D. and B.S. degrees in physics from Korea Advanced Institute of Science and Technology (KAIST) and Korea University, respectively.

Prof. Yuan-Hong SONG

Dalian University of Technology, China

Prof. Dr. Yuan-Hong Song obtained her PhD in plasma physics at Dalian University of Technology (DUT), China, in 2004. She served as the leader of the National key discipline of Plasma Physics at DUT, from 2018-2022. Her major is plasma physics and her research interests now include Low Temperature Plasma Physics, Complex Plasma Physics, and Interactions of Charged Particle beams with Matter. She has published approximately 100 papers in peer-reviewed international journals, and has been selected in the project of ‘New Century Excellent Talents in University’ awarded by Ministry of Education of China in 2008, and in the ‘Hundreds of Talents Project’ awarded by the Liaoning Province Government in 2011. Her ‘Theoretical research on the interactions of ion beams with matter’ was awarded as Natural Sciences Prize by the Liaoning Province Government.

She is now leading one of the most important plasma associations in China, as President of Plasma Sci & Technol. Specialized Committee and member of the Eleventh Executive Board, of the Chinese Society of Theoretical and Applied Mechanics. She is also a member of the Board of Directors (BoD) of the International Plasma Chemistry Society (IPCS), and an Editorial Board member of Plasma Sci. & Technol (PST). She was invited as international organizing members of lots of international conference, such as International Conference on Plasma Sciences (ICOPS), International Symposium on Plasma Chemistry (ISPC), International Conference on Microelectronics and Plasma Technology (ICMAP), Asia-Pacific Conference on Plasma Science and Technology (APCPST), and Asia-Pacific Conference on Plasma Physics (AAPPS-DPP).